Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors

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Bibliographic Details
Published in:Measurement science & technology 2011-11, Vol.22 (11), p.115206
Main Authors: Yoo, K P, Hong, H P, Lee, M J, Min, S J, Park, C W, Choi, W S, Min, N K
Format: Article
Language:English
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ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/22/11/115206