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A cylindrical envelope projection model for estimation of secondary electron intensity distribution at micro-steps

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Bibliographic Details
Published in:	Measurement science & technology 1993-08, Vol.4 (8), p.842-845
Main Author:	Hatsuzawa, T
Format:	Article
Language:	English
Subjects:	Electron, positron and ion microscopes, electron diffractometers and related techniques Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Scanning probe microscopes, components, and techniques
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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