Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates

Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a t...

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Bibliographic Details
Published in:Nanotechnology 2006-08, Vol.17 (15), p.3925-3929
Main Authors: Maschmann, Matthew R, Franklin, Aaron D, Amama, Placidus B, Zakharov, Dmitri N, Stach, Eric A, Sands, Timothy D, Fisher, Timothy S
Format: Article
Language:English
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Summary:Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/17/15/052