Effect of germanium concentration and oxide diffusion barrier on the formation and distribution of germanium nanocrystals in silicon oxide matrix

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Bibliographic Details
Published in:Nanotechnology 2006-04, Vol.17 (8), p.1964-1968
Main Authors: Chew, H G, Choi, W K, Foo, Y L, Zheng, F, Chim, W K, Voon, Z J, Seow, K C, Fitzgerald, E A, Y Lai, D M
Format: Article
Language:English
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/17/8/028