On the mutual capacitance and inductance of a shielded interconnect four-line system

In this paper, the capacitance and inductance of a four-line transmission structure is characterized. The procedure used was developed by Ymeri et al for general analysis of multilayer multiconductor interconnects for specific applications in microelectronics. The characterization is based on the de...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2001-05, Vol.11 (3), p.161-164
Main Authors: Ymeri, H, Nauwelaers, B, Maex, K
Format: Article
Language:English
Subjects:
Applied sciences
Capacitance
Crosstalk
Design. Technologies. Operation analysis. Testing
Electric potential
Electronics
Exact sciences and technology
Frequency domain analysis
Inductance
Integrated circuits
Large scale systems
Microelectronics
Microelectronics: LSI, VLSI, ULSI
integrated circuit fabrication technology
Multilayers
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Time domain analysis
VLSI circuits
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Description
Summary:In this paper, the capacitance and inductance of a four-line transmission structure is characterized. The procedure used was developed by Ymeri et al for general analysis of multilayer multiconductor interconnects for specific applications in microelectronics. The characterization is based on the determination of the quasi-static electric scalar potential in the structure making up the four-line interconnect. Using the electric potential, the mutual capacitances and inductances are found. The characterization of the four-conductor structure is significantly different from the simple conductor pair because the symmetry of the pair is lost. A number of numerical results are calculated and presented.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/11/3/301