Effects of roughness on rarefied gas flow in long microtubes

We propose a model that describes the behavior of rarefied gas flow in long microtubes. The inner surface is modeled as an annulus porous film pressed on an impermeable surface. The appropriate slip-flow boundary conditions (the high-order slip-flow model; Weng C-I et al, 1999) and the proper porous...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2002-03, Vol.12 (2), p.149-156
Main Authors: Li, Wang-Long, Lin, Jau-Wen, Lee, Shun-Ching, Chen, Ming-Da
Format: Article
Language:English
Subjects:
Applied sciences
Boundary conditions
Exact sciences and technology
Flow of fluids
Inert gases
Interfaces (materials)
Mathematical models
Mechanical engineering. Machine design
Porous materials
Precision engineering, watch making
Pressure distribution
Surface roughness
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Summary:We propose a model that describes the behavior of rarefied gas flow in long microtubes. The inner surface is modeled as an annulus porous film pressed on an impermeable surface. The appropriate slip-flow boundary conditions (the high-order slip-flow model; Weng C-I et al, 1999) and the proper porous flow model (the Brinkman-extended Darcy model; Li W-L and H Wang C-C, 1999) are utilized in the core gas region and annulus porous region, respectively. Moreover, utilizing the matched conditions (velocity slip and stress continuity) at the gas/porous interface, we derive the governing equation of pressure distribution in long microtubes. We discuss the effects of pressure drop, roughness, and gas rarefaction on the pressure distribution and velocity distributions of long microtubes. Moreover, the analytical solution of the pressure distribution for the first-order slip-flow model is obtained. The present results are valuable for the design and analysis of fluid flow in microelectromechanical systems. (Author)
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/12/2/308