Ultrafast laser micromachining and patterning of thermal spray multilayers for thermopile fabrication

This work presents a conformal direct-write technique for rapid prototyping and manufacturing of high-density thermopiles. The technique combines thermal spray, which, as an additive process, produces blanket depositions of films and coatings, with ultrafast laser micromachining, a subtractive proce...

Full description

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2004-04, Vol.14 (4), p.506-513
Main Authors: Chen, Q, Longtin, J P, Tankiewicz, S, Sampath, S, Gambino, R J
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Precision engineering, watch making
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This work presents a conformal direct-write technique for rapid prototyping and manufacturing of high-density thermopiles. The technique combines thermal spray, which, as an additive process, produces blanket depositions of films and coatings, with ultrafast laser micromachining, a subtractive process to produce functional patterns. NiCr/CuNi-based (E-type) thermopiles with 19, 40 and 81 junctions have been fabricated and characterized. The electrical and thermal behavior is discussed as a function of load resistance and maximum power produced. Being made using thermal spray, these thermopiles are particularly well suited for high temperature and harsh environments.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/14/4/010