Non-tilting out-of-plane mode high-Q mechanical silicon oscillator

A single-crystal silicon oscillator with a non-tilting out-of-plane vibrational mode and high-quality factor for the mechanical resonance was designed, fabricated and characterized. The finite-element method (FEM) was utilized before the fabrication process to simulate the oscillator behavior and gi...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2005-10, Vol.15 (10), p.1848-1853
Main Authors: Hahtela, O, Chekurov, N, Tittonen, I
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:A single-crystal silicon oscillator with a non-tilting out-of-plane vibrational mode and high-quality factor for the mechanical resonance was designed, fabricated and characterized. The finite-element method (FEM) was utilized before the fabrication process to simulate the oscillator behavior and give guidance in optimizing the design. At low pressure p =10-3 mbar and at room temperature, the resonance frequency and Q value were measured to be f0 = 26 526 Hz and Q = 100 000, respectively. The measured resonance frequency was in a good agreement with the simulated one, f0,FEM = 26 787 Hz. The actual mode pattern was verified by measurements and compared with the simulation result. An interferometric laser beam was scanned over the oscillator surface and position-dependent oscillation amplitudes were stored with the phase-sensitive detection. The oscillation was proved to occur effectively in a pure non-tilting out-of-plane mode. We propose to use this kind of micromechanical probe in various measurement schemes, where one needs to approach the surface with a single non-torsional plane. In addition, such an oscillator can be utilized as an optical mirror so that the optical mode can be kept the same when moving the mirror.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/15/10/009