A nanomechanical switch for integration with CMOS logic

• Published in: Journal of micromechanics and microengineering 2009-08, Vol.19 (8), p.085003-085003 (12)
• Main Authors: Czaplewski, David A, Patrizi, Gary A, Kraus, Garth M, Wendt, Joel R, Nordquist, Christopher D, Wolfley, Steven L, Baker, Michael S, de Boer, Maarten P
• Format: Article
• Language: English
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/19/8/085003

We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off'state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.