A study on corrugated diaphragms for high-sensitivity structures

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 1997-12, Vol.7 (4), p.310-315
Main Authors: Zou, Quanbo, Wang, Zhenfeng, Lin, Rongming, Yi, Sung, Gong, Haiqing, Lim, Mongking, Li, Zhijian, Liu, Litian
Format: Article
Language:English
Subjects:
Acoustics
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/7/4/006