Diagnostic studies of species concentrations in a capacitively coupled RF plasma containing CH4-H2-Ar

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Bibliographic Details
Published in:Plasma sources science & technology 2001-08, Vol.10 (3), p.530-539
Main Authors: Gathen, V Schulz-von der, Röpcke, J, Gans, T, Käning, M, Lukas, C, Döbele, H F
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
Optical (ultraviolet, visible, infrared) measurements
Other gas discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma diagnostic techniques and instrumentation
Online Access:Get full text
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/10/3/318