Negative ion density measurements in a reactive dc magnetron using the eclipse photodetachment method

The density of negative oxygen ions in the bulk plasma of a reactive dc magnetron has been determined for the first time using a combination of laser photodetachment and Langmuir probing. Experimental results are obtained for various O2/Ar gas mixtures (0-100%), applied powers (50-600 W) and total d...

Full description

Saved in:
Bibliographic Details
Published in:Plasma sources science & technology 2010-02, Vol.19 (1), p.015021-015021 (13)
Main Authors: Dodd, R, You, S-D, Bryant, P M, Bradley, J W
Format: Article
Language:English
Subjects:
Applied sciences
Electronic tubes, masers
Electronics
Exact sciences and technology
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The density of negative oxygen ions in the bulk plasma of a reactive dc magnetron has been determined for the first time using a combination of laser photodetachment and Langmuir probing. Experimental results are obtained for various O2/Ar gas mixtures (0-100%), applied powers (50-600 W) and total discharge pressures (2-25 mTorr). The measurements reveal that the O- ion dominates over with the latter less than 2% of the total observed. Variation of the operating parameters showed clear trends in the negative ion densities with maxima observed at particular powers (200 W) and oxygen partial pressures (10% O2). The negative ion density was found to increase with the chamber pressure and the main loss reaction for O- was determined to be ion-ion recombination with O+, and Ar+.
ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/19/1/015021