Time-resolved optical emission spectroscopy of modulated plasmas for amorphous silicon deposition

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Bibliographic Details
Published in:Plasma sources science & technology 1992-08, Vol.1 (3), p.156-165
Main Authors: Cicala, G, Losurdo, M, Capezzuto, P, Bruno, G
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/1/3/003