Atomic oxygen radio-frequency source and its application to the treatment of mixed valence copper oxide thin films

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Bibliographic Details
Published in:Plasma sources science & technology 1992-08, Vol.1 (3), p.175-178
Main Authors: Guymont, O, Duc, E Le, Pagnon, D, Pointu, A M, Touzeau, M, Vialle, M, Mercey, B, Murray, H
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/1/3/005