Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

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Bibliographic Details
Published in:Plasma sources science & technology 2011-04, Vol.20 (2), p.025011
Main Authors: Greenan, J, Mahony, C M O, Mariotti, D, Maguire, P D
Format: Article
Language:English
Subjects:
Elementary processes in plasma
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/20/2/025011