Spectral selective plasma imaging in the wavelength range 2.4 - 4.5 nm in SPEED 2 device

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Bibliographic Details
Published in:Plasma sources science & technology 1996-08, Vol.5 (3), p.578-581, Article 578
Main Authors: Bobashev, S V, Simanovskii, D M, Platonov, Yu Ya, Röwekamp, P, Decker, G, Kies, W
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/5/3/028