Laser-induced fluorescence measurements of absolute SiH densities in - RF discharges and comparison with a numerical model

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Bibliographic Details
Published in:Plasma sources science & technology 1998-05, Vol.7 (2), p.130-135
Main Authors: Hertl, Michael, Dorval, Nelly, Leroy, Olivier, Jolly, Jacques, Péalat, Michel
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/7/2/006