Experimental investigation of powder formation in SiF4-H2 and SiH4-H2 r.f. discharges

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Bibliographic Details
Published in:Plasma sources science & technology 1999-05, Vol.8, p.279
Main Authors: Cicala, G, Shakhatov, V A, Pascale, O De, Capezzuto, P, Bruno, G
Format: Article
Language:English
Online Access:Get full text
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/8/2/308