Development of a UHV compatible hollow cathode arc source for the deposition of hard nitride coatings

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Bibliographic Details
Published in:Plasma sources science & technology 2000-02, Vol.9 (1), p.25-31
Main Authors: Isfort, D, Buck, V
Format: Article
Language:English
Subjects:
Arcs, sparks, lightning
Discharge in vacuum
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/9/1/305