Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing

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Bibliographic Details
Published in:Chinese physics (Beijing, China) China), 2002-05, Vol.11 (5), p.492-495, Article 315
Main Authors: Yong-Qian, Wang, Xian-Bo, Liao, Shi-Bin, Diao Hong-Wei, Zhang, Yan-Yue, Xu, Wei-De, Chen Chang-Yong, Chen, Guang-Lin, Kong
Format: Article
Language:English
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ISSN:1009-1963
DOI:10.1088/1009-1963/11/5/315