In situ high temperature X-ray diffraction studies of ZnO thin film

An epitaxial ZnO thin film was entirely fabricated by pulsed laser deposition. Both the orientation and the size of the crystallites were studied. The X-ray diffraction （XRD） patterns of the film show strong c-axis oriented crystal structure with preferred （002） orientation. The Phi-sca~ XRD pattern...

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Bibliographic Details
Published in:Chinese physics B 2011-09, Vol.20 (9), p.5-7
Main Author: 陈香存 周解平 王海洋 徐彭寿 潘国强
Format: Article
Language:English
Subjects:
Crystallites
Diffraction
Epitaxy
Lattice parameters
Orientation
Thin films
X-rays
XRD图谱
Zinc oxide
ZnO薄膜
原位X射线衍射
晶格参数
晶粒尺寸
温度升高
脉冲激光沉积
高温
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Summary:An epitaxial ZnO thin film was entirely fabricated by pulsed laser deposition. Both the orientation and the size of the crystallites were studied. The X-ray diffraction （XRD） patterns of the film show strong c-axis oriented crystal structure with preferred （002） orientation. The Phi-sca~ XRD pattern confirms that the epitaxiM ZnO exhibits a single- domain wurtzite structure with hexagonal symmetry. In situ high-temperature XRD studies of ZnO thin film show that the crystallite size increases with increasing temperature, and （002） peaks shift systematically toward lower 20 values due to the change of lattice parameters. The lattice parameters show linear increase in their values with increasing temperature.
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/20/9/096102