ELDRS and dose-rate dependence of vertical NPN transistor

The enhanced low-dose-rate sensitivity （ELDRS） and dose-rate dependence of vertical NPN transistors are investigated in this article. The results show that the vertical NPN transistors exhibit more degradation at low dose rate, and that this degradation is attributed to the increase on base current....

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Bibliographic Details
Published in:Chinese physics C 2009, Vol.33 (1), p.47-49
Main Author: 郑玉展 陆妩 任迪远 王改丽 余学锋 郭旗
Format: Article
Language:English
Subjects:
ELDRS
NPN结
电子晶体管
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Summary:The enhanced low-dose-rate sensitivity （ELDRS） and dose-rate dependence of vertical NPN transistors are investigated in this article. The results show that the vertical NPN transistors exhibit more degradation at low dose rate, and that this degradation is attributed to the increase on base current. The oxide trapped positive charge near the SiO2-Si interface and interface traps at the interface can contribute to the increase on base current and the two-stage hydrogen mechanism associated with space charge effect can well explain the experimental results.
ISSN:1674-1137
0254-3052
2058-6132
DOI:10.1088/1674-1137/33/1/010