Improved light extraction in AlGaInP-based LEDs using a self-assembly metal nanomask

This paper reports a new method of fabricating AlGaInP-based nanorod light emitting diodes（LEDs） by using self-assembly metal layer nanomasks and inductively coupled plasma.Light-power measurements indicate that the scattering of photons considerably enhances the probability of escaping from the nan...

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Bibliographic Details
Published in:Journal of semiconductors 2010-06, Vol.31 (6), p.57-59
Main Author: 蒋文静 徐晨 沈光地 方瑢 高伟
Format: Article
Language:English
Subjects:
LED
nP型
功率测量
提取
电感耦合
纳米棒
自组装
金属层
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Summary:This paper reports a new method of fabricating AlGaInP-based nanorod light emitting diodes（LEDs） by using self-assembly metal layer nanomasks and inductively coupled plasma.Light-power measurements indicate that the scattering of photons considerably enhances the probability of escaping from the nanorod LEDs.The light-intensity of the nanorod LED is increased by 34%for a thin GaP window layer,and by 17%for an 8μm GaP window layer.The light-power of the nanorod LED is increased by 25%and 13%,respectively.
ISSN:1674-4926
DOI:10.1088/1674-4926/31/6/064008