Performance test of Mo/Si and MoSi2/Si multilayer Laue lenses

A multilayer Laue lens (MLL) as a hard X-ray focusing device has been designed and fabricated. Mo/Si and MoSi2/Si were chosen to form the multilayers owing to their superior properties of high diffraction efficiency and relatively sharp interface between layers. DC magnetron sputtering system was us...

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Bibliographic Details
Published in:Journal of physics. Conference series 2009-09, Vol.186 (1), p.012066
Main Authors: Koyama, T, Tsuji, T, Takano, H, Kagoshima, Y, Ichimaru, S, Ohchi, T, Takenaka, H
Format: Article
Language:English
Subjects:
Diffraction efficiency
Incidence angle
Magnetron sputtering
Molybdenum disilicides
Multilayers
Optical properties
Performance tests
Physics
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Summary:A multilayer Laue lens (MLL) as a hard X-ray focusing device has been designed and fabricated. Mo/Si and MoSi2/Si were chosen to form the multilayers owing to their superior properties of high diffraction efficiency and relatively sharp interface between layers. DC magnetron sputtering system was used for deposition of the multilayers. The optical properties of the MLL were measured at BL24XU of SPring-8 with 20-keV X-rays. To confirm the dynamical diffraction effect, far-field diffraction images were taken at various incidence angles and depths. The resultant intensity distributions showed similar structure to those expected by calculations. Further, an almost diffraction-limited beam size of around 30 nm was obtained.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/186/1/012066