Microfabricated Silicon Microneedle Array for Transdermal Drug Delivery

This paper presents developed processes for silicon microneedle arrays microfabrication. Three types of microneedles structures were achieved by isotropic etching in inductively coupled plasma (ICP) using SF6/O2 gases, combination of isotropic etching with deep etching, and wet etching, respectively...

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Bibliographic Details
Published in:Journal of physics. Conference series 2006-04, Vol.34 (1), p.1127-1131
Main Authors: Ji, Jing, Tay, Francis Eh, Miao, Jianmin, Iliescu, Ciprian
Format: Article
Language:English
Subjects:
Arrays
Biodegradability
Etching
Inductively coupled plasma
Needles
Physics
Silicon
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Summary:This paper presents developed processes for silicon microneedle arrays microfabrication. Three types of microneedles structures were achieved by isotropic etching in inductively coupled plasma (ICP) using SF6/O2 gases, combination of isotropic etching with deep etching, and wet etching, respectively. A microneedle array with biodegradable porous tips was further developed based on the fabricated microneedles.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/34/1/186