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A simplified high-speed bipolar process with Ti salicide metallization: implementation of in situ p-doped polysilicon emitter

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Bibliographic Details
Published in:	Physica scripta 1999-01, Vol.1999 (1), p.318
Main Authors:	Kaplan, W, Pejnefors, J, Linder, M, Sandén, M, Karlin, T E, Malm, G, Zhang, S-L, Grahn, J V, Östling, M
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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