Green Fluorescence of Mn-Doped Zn2SiO4 Thin Film Enhanced by Surface Plasmon of Nano-Silver Coating

• Published in: Jpn J Appl Phys 2013-01, Vol.52 (1), p.01AC02-01AC02-6
• Main Authors: Peng, Kun-Cheng, Lin, Yi-Chung, Liu, Shiu-Jen, Hsieh, Keng-Lin, Tseng, Chiun-An, Lin, Jing-Chie
• Format: Article
• Language: English
• ISSN: 0021-4922; 1347-4065
• DOI: 10.7567/JJAP.52.01AC02

One thin film of Mn-doped ZnO was deposited on a quartz glass in a sputtering system where RF magnetron and DC were employed as power sources. The specimen was removed and annealed in an atmospheric furnace at 1200 °C for 2 h. This annealed specimen was identified as Mn-doped Zn 2 SiO 4 (MZS) crystal. The sample was sputtered to coat it with one Ag film varying in thickness (i.e., 3, 5, and 10 nm), and subjected to rapid thermal annealing (RTA) at 500 °C for 15 min. The post-RTA-treated specimens were denoted as 3 Ag(MZS)R, 5 Ag(MZS)R, and 10 Ag(MZS)R, and their surfaces revealed a homogenous distribution of silver nanoparticles. Photoluminescence (PL) measurement showed a fluorescence of 530 nm (green light) emitted from MZS. A coating of Ag particles on MZS tended to increase the PL intensity in the following order: 10 Ag(MZS)R (29%) $