Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from...

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Bibliographic Details
Published in:Europhysics letters 2010-11, Vol.92 (3), p.36005
Main Authors: Autier-Laurent, S, Plantevin, O, Lecoeur, P, Decamps, B, Gentils, A, Bachelet, C, Kaitasov, O, Baldinozzi, G
Format: Article
Language:English
Subjects:
61.05.cp
68.35.Gy
68.55.Ln
Chemical Sciences
Condensed Matter
Material chemistry
Materials Science
Physics
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Summary:The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5–7% are obtained with no evidence of amorphisation at fluences of 1016 He+ ions/cm2 and ion energies in the range 10–30 keV.
ISSN:0295-5075
1286-4854
DOI:10.1209/0295-5075/92/36005