Materials ( Organic , Inorganic , Electronic , Thin films ) , Polymer , Fluidization , Particle Technology : Applications of Atomic Layer Chemical Vapor Deposition for the Processing of Nanolaminate Structures

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Bibliographic Details
Published in:The Korean journal of chemical engineering 2002-01, Vol.19 (3), p.451
Main Authors: Ki Jung Yong, Joon Hee Jeong
Format: Article
Language:Korean
Online Access:Get full text
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ISSN:0256-1115
1975-7220