Amorphous Silicon Carbon Nitride Films Grown by the Pulsed Laser Deposition of a SiC-Si 3 N 4 Mixed Target

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Bibliographic Details
Published in:ETRI journal 2004-02, Vol.26 (3), p.257-261
Main Authors: Nae-Man Park, Sang Hyeob Kim, Gun Yong Sung
Format: Article
Language:Korean
Online Access:Get full text
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ISSN:1225-6463