Microfabricated polydimethylsiloxane microfluidic system including micropump and microvalve for integrated biosensor

We present a microfluidic system with paraffin-actuated microvalves and a thermopneumatic-actuated micropump that are easily integrated on the same substrate using the same fabrication process. The fabrication process of this microfluidic system using polydimethylsiloxane (PDMS), indium tin oxide (I...

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Bibliographic Details
Published in:Current applied physics 2008, 8(6), , pp.692-695
Main Authors: Yoo, Jong-Chul, La, Gyu-Sik, Kang, C.J., Kim, Yong-Sang
Format: Article
Language:English
Subjects:
ITO
Microfluidic system
Micropump
Microvalve
PDMS
물리학
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Summary:We present a microfluidic system with paraffin-actuated microvalves and a thermopneumatic-actuated micropump that are easily integrated on the same substrate using the same fabrication process. The fabrication process of this microfluidic system using polydimethylsiloxane (PDMS), indium tin oxide (ITO) and glass is relatively simple, and its performance is good for the application of the disposable lab-on-a-chip. A maximum pumping rate of about 2.0μl/min was measured at a duty ratio of 5% and a frequency of 1Hz. The flow cut-off powers for the microvalves with the channel depth of 220μm, were 300 and 350mW for valve seat diameters of 1.5 and 2.0mm, respectively. The power for flow cut-off depends on the channel depth and the diameter of the valve seat in the microvalves.
ISSN:1567-1739
1878-1675
DOI:10.1016/j.cap.2007.04.050