Fabrication of low‐loss symmetrical rib waveguides based on x‐cut lithium niobate on insulator for integrated quantum photonics

Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabricated LNOI rib waveguides with a low optical propagation loss of 0.16 dB/...

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Bibliographic Details
Published in:ETRI journal 2024, 46(5), , pp.783-792
Main Authors: Kim, Hong‐Seok, Kim, Guhwan, Slusar, Tetiana, Kim, Jinwoo, Park, Jiho, Park, Jaegyu, Hwang, Hyeon, Noh, Woojin, Lee, Hansuek, Seo, Min‐Kyo, Moon, Kiwon, Ju, Jung Jin
Format: Article
Language:English
Subjects:
integrated quantum photonics
lithium niobate on insulator
low-loss rib waveguide
microring resonator
shallow etching
전자/정보통신공학
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Summary:Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabricated LNOI rib waveguides with a low optical propagation loss of 0.16 dB/cm by optimizing the etching conditions for various parameters. The symmetry and smoothness of the waveguides on x‐cut LNOI are improved by employing a shallow etching process. The proposed method is expected to facilitate the development of on‐chip quantum photonic devices based on LNOI.
ISSN:1225-6463
2233-7326
DOI:10.4218/etrij.2024-0137