Membrane-type vibrational energy harvester based on a multi-layered piezoelectric membrane

• Published in: Journal of the Korean Physical Society 2014, 64(5), , pp.706-709
• Main Authors: Yoo, Seunghwan, Kim, Jonghun, Park, Suk-in, Jang, Cheol-Yong, Jeong, Hakgeun
• Format: Article
• Language: English
• Subjects: Mathematical and Computational Physics; Particle and Nuclear Physics; Physics; Physics and Astronomy; Theoretical; 물리학
• ISSN: 0374-4884; 1976-8524
• DOI: 10.3938/jkps.64.706

In this study, we fabricated a membrane-type vibrational energy harvester by using a conventional micro-electro-mechanical (MEMS) method. The membrane-type vibrational energy harvester consists of a multi-layered diaphragm for stable and flexible vibration, a piezoelectric ZnO film for responding to the vibrational energy and for generating electric power, and a vibrator connected to the bottom of multi-layered diaphragm for enhancing the vibrational displacement of the diaphragm. First, we characterized the quality of a ZnO film through scanning electron microscopy (SEM), atomic force microscopy (AFM), and X-ray diffraction (XRD), which showed a preferred c -axis orientation, a hexagonal rod shape and a quite smooth surface. After the membrane-type vibrational energy harvester had been fabricated, we integrated it into a printing circuit board to realize piezoelectric generation and confirm its performance. Finally, under vibrational motion, we obtained a useful output voltage of 400 mV, and we estimated that the energy harvester generated an actual output voltage of about 200 uV.