Inductively-coupled nonthermal plasma for synthesis of silicon nanocrystals

Silicon nanocrystals (Si NCs) with an average diameter of 17.7 nm were synthesized using a flow-through, inductively-coupled nonthermal plasma. The crystalline Si nanoparticles (NPs) were confirmed by using transmission electron microscope (TEM) images, X-ray diffraction (XRD) analyses, and Raman sp...

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Bibliographic Details
Published in:Journal of the Korean Physical Society 2012, 61(7), , pp.995-997
Main Authors: Oh, Kyoung Suk, Kim, Seongbeom, Lee, Jeong Chul, Sohn, Young-Soo
Format: Article
Language:English
Subjects:
Letters
Mathematical and Computational Physics
Particle and Nuclear Physics
Physics
Physics and Astronomy
Theoretical
물리학
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Summary:Silicon nanocrystals (Si NCs) with an average diameter of 17.7 nm were synthesized using a flow-through, inductively-coupled nonthermal plasma. The crystalline Si nanoparticles (NPs) were confirmed by using transmission electron microscope (TEM) images, X-ray diffraction (XRD) analyses, and Raman spectroscopy measurements. In addition, scanning electron microscope (SEM) measurements showed that the use of a nonthermal plasma prevented the agglomeration of the Si NPs. These Si NCs synthesized by using a nonthermal plasma can be applied to various interesting fields such as photovoltaic cells, labels for biosensors, light-emitting diodes, and so forth.
ISSN:0374-4884
1976-8524
DOI:10.3938/jkps.61.995