Fluid simulation of a pulse-modulated, inductively coupled plasma discharge with radio frequency bias

The plasma characteristics of pulse-modulated, radio frequency (RF) power in an inductively coupled plasma discharge were investigated. A two-dimensional axisymmetric structure was simulated based on the fluid model. In addition, the energy and mobility of neutral species were considered. When the p...

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Bibliographic Details
Published in:Current applied physics 2017, 17(3), , pp.403-408
Main Authors: Jeong, YoungDo, Lee, Young Jun, Kwon, Deuk-Chul, Choe, HeeHwan
Format: Article
Language:English
Subjects:
GEC cell
ICP discharge
Plasma simulation
Pulse ICP
RF-bias effect
물리학
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Summary:The plasma characteristics of pulse-modulated, radio frequency (RF) power in an inductively coupled plasma discharge were investigated. A two-dimensional axisymmetric structure was simulated based on the fluid model. In addition, the energy and mobility of neutral species were considered. When the power was switched to ON from OFF, the electron density and electron temperature changed instantaneously. When the power was OFF, we analyzed the profiles of the electron density and electron temperature over time. Moreover, the ion energy distribution function was investigated using several RF bias conditions. •The profiles of plasma parameters during a pulse period were investigated.•The IEDF was investigated using several RF bias conditions.•When the power changed to ON from OFF, the electron density decreased for a moment.•In several bias conditions, the electron temperature profiles were very different.
ISSN:1567-1739
1878-1675
DOI:10.1016/j.cap.2017.01.001