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Elastic Modulus of HfO2 Thin Film Grown by Atomic Layer Deposition with Wrinkle‐based Measurement

KCI Citation Count: 1

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Bibliographic Details
Published in:Bulletin of the Korean Chemical Society 2017, 38(10), , pp.1246-1249
Main Authors: Choi, Hyun‐Ju, Kim, Yongseong
Format: Article
Language:English
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Description
Summary:KCI Citation Count: 1
ISSN:1229-5949
0253-2964
1229-5949
DOI:10.1002/bkcs.11251