Electron Collision Cross Sections for the TRIES Molecule and Electron Transport Coecients in TRIES-Ar and TRIES-O2 Mixtures

A reliable set of low-energy electron collision cross sections for the triethoxysilane (TRIES) molecule was derived based on the measured electron transport coecients for a pure TRIES molecule by using an electron swarm method and a two-term approximation of the Boltzmann equation. The electron tran...

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Published in:Journal of the Korean Physical Society 2018, 73(12), , pp.1855-1862
Main Authors: Phan Thi Tuoi, Do Anh Tuan, Pham Xuan Hien
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Language:English
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Do Anh Tuan
Pham Xuan Hien
description A reliable set of low-energy electron collision cross sections for the triethoxysilane (TRIES) molecule was derived based on the measured electron transport coecients for a pure TRIES molecule by using an electron swarm method and a two-term approximation of the Boltzmann equation. The electron transport coecients calculated using the derived set are in good agreement with experimental value over a wide range of E=N values (ratio of the electric field E to the neu- tral number density N). The present electron collision cross section set for the TRIES molecule, therefore, is the most reliable so far for plasma discharges and for materials processing using the TRIES molecule. Moreover, the electron transport coecients for the TRIES-Ar and the TRIES-O2 mixtures were also calculated and analyzed over a wide range of E=N for the first time. KCI Citation Count: 0
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title Electron Collision Cross Sections for the TRIES Molecule and Electron Transport Coecients in TRIES-Ar and TRIES-O2 Mixtures
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