Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime

Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniformly patterned substrate. In this study, we investiga...

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Bibliographic Details
Published in:Electronic materials letters 2019, 15(3), , pp.357-362
Main Authors: Ryu, Heon-Yul, Kim, Ji-Woo, Hyun, Da-Bin, Kim, Yeo-Ho, Lee, Jung-Hwan, Park, Jin-Goo
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Chemical vapor deposition
Chemical-mechanical polishing
Chemistry and Materials Science
Condensed Matter Physics
Crystals
Diamond films
Materials Science
Methane
Nanotechnology
Nanotechnology and Microengineering
Optical and Electronic Materials
Organic chemistry
Original Article - Nanomaterials
Performance enhancement
Substrates
전자/정보통신공학
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Summary:Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniformly patterned substrate. In this study, we investigated the pad conditioner lifetime while varying the crystal size of the deposited diamond film, which was controlled via different methane (CH 4 ) gas concentrations in hydrogen gas (H 2 ). Microcrystalline diamond (MCD) film was formed using 2% CH 4 in H 2 flow and nanocrystalline diamond film (NCD) was formed with 4% CH 4 . The NCD film showed a longer lifetime and higher adhesion with the substrate than the MCD film. Graphical Abstract
ISSN:1738-8090
2093-6788
DOI:10.1007/s13391-019-00123-0