Performance Test of a Laboratory-Based Ambient Pressure X-ray Photoelectron Spectroscopy System at the Gwangju Institute of Science and Technology

The performance test of a laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at the Gwangju Institute of Science and Technology (GIST) was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al Kα X-ray source, is desig...

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Bibliographic Details
Published in:Journal of the Korean Physical Society 2019, 75(7), , pp.541-546
Main Authors: Lim, Hojoon, Yu, Youngseok, Kim, Dongwoo, Koh, Yoobin Esther, Mun, Bongjin Simon, Lehane, Vincent
Format: Article
Language:English
Subjects:
Electron transfer
Electrons
Gas pressure
Imaging
Laboratories
Mathematical and Computational Physics
Organic chemistry
Particle and Nuclear Physics
Performance tests
Photoelectrons
Physics
Physics and Astronomy
Pressure measurement
Signal to noise ratio
Spatial data
Spatial resolution
Spectrum analysis
Theoretical
X ray photoelectron spectroscopy
X ray sources
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Summary:The performance test of a laboratory based ambient pressure X-ray photoelectron spectroscopy (AP-XPS) system at the Gwangju Institute of Science and Technology (GIST) was carried out. The system, consisted of a Scienta R4000 HiPP-3 electron analyzer and a monochromatized Al Kα X-ray source, is designed to operate a gas pressure of up to 25 Torr. An Al polyimide X-ray window is used to isolate the X-ray source from the back-filled-type ambient pressure measurement chamber. Two modes of XPS operations were tested, a one-dimensional chemical imaging mode and a transmission mode. In the transmission mode, the lens voltage of analyzer was optimized for maximum detection of photo-excited electrons under elevated pressure condition, i.e. , a typical standard lens operation mode. On the other hand, in the imaging mode, spatial information on the outgoing electrons is conserved to generate a one-dimensional chemical image of surface being measured. The test of the imaging mode on a Au/Si reference sample showed a spatial resolution of ∼10 µ m under an Ar gas pressure of 500 mTorr. With the superb design of the differential pump and the electron transfer optics, a good signal-to-noise ratio was obtained for the XPS core-level spectra at Ar gas pressure up to 1 Torr.
ISSN:0374-4884
1976-8524
DOI:10.3938/jkps.75.541