A study on the evaporation process with multiple point-sources

In Organic Light Emitting Display (OLED) manufacturing processes, there is a need to enlarge the mother glass substrate to raise its productivity and enable OLED TV. The larger the size of the glass substrate, the more difficult it is to establish a uniform thickness profile of the organic thin-film...

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Bibliographic Details
Published in:Electronic materials letters 2013, 9(0), , pp.7-11
Main Authors: Jun, Sunghoon, Kim, Minseok, Kim, Suk Han, Lee, Moon Yong, Lee, Eung Ki
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Chemistry and Materials Science
Condensed Matter Physics
Materials Science
Nanotechnology
Nanotechnology and Microengineering
Optical and Electronic Materials
전자/정보통신공학
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Summary:In Organic Light Emitting Display (OLED) manufacturing processes, there is a need to enlarge the mother glass substrate to raise its productivity and enable OLED TV. The larger the size of the glass substrate, the more difficult it is to establish a uniform thickness profile of the organic thin-film layer in the vacuum evaporation process. In this paper, a multiple point-source evaporation process is proposed to deposit a uniform organic layer uniformly. Using this method, a uniformity of 3.75% was achieved along a 1,300 mm length of Gen. 5.5 glass substrate (1300 × 1500 mm 2 ).
ISSN:1738-8090
2093-6788
DOI:10.1007/s13391-013-3181-4