Structural analysis for the stress variation of ta-C film with deposition energy: A molecular dynamics simulation

Molecular dynamics simulations are performed on the atomic origin of the evolution of residual stress in tetrahedral amorphous carbon (ta-C) film using the empirical Tersoff potential. The densities of and residual stresses in the amorphous films generated by molecular dynamics simulations were foun...

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Bibliographic Details
Published in:Metals and materials international 2008, 14(3), , pp.347-352
Main Authors: Kim, Kyung-Soo, Lee, Seung-Hyeob, Kim, Yoo-Chan, Lee, Seung-Cheol, Cha, Pil-Ryung, Lee, Kwang-Ryeol
Format: Article
Language:English
Subjects:
Carbon
Characterization and Evaluation of Materials
Chemistry and Materials Science
Density
Engineering Thermodynamics
Evolution
Heat and Mass Transfer
Machines
Magnetic Materials
Magnetism
Manufacturing
Materials Science
Metallic Materials
Molecular dynamics
Processes
Radial distribution
Residual stress
Simulation
Solid Mechanics
Tantalum
재료공학
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Summary:Molecular dynamics simulations are performed on the atomic origin of the evolution of residual stress in tetrahedral amorphous carbon (ta-C) film using the empirical Tersoff potential. The densities of and residual stresses in the amorphous films generated by molecular dynamics simulations were found to be in good agreement with the corresponding experimental results. A radial distribution function analysis shows that the peak at approximately 2.1 Å found in high-stress configurations, which is referred to as a satellite peak, is closely linked with the variation of the residual stress in ta-C film.
ISSN:1598-9623
2005-4149
DOI:10.3365/met.mat.2008.06.347