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Formation of nanodots and nanostripes of carbon nitride on silicon by plasma and thermal treatments
KCI Citation Count: 1
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Published in: | The Korean journal of chemical engineering 2006, 23(2), 101, pp.325-328 |
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Main Authors: | , , |
Format: | Article |
Language: | Korean |
Subjects: | |
Online Access: | Get full text |
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Summary: | KCI Citation Count: 1 |
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ISSN: | 0256-1115 1975-7220 |