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Formation of nanodots and nanostripes of carbon nitride on silicon by plasma and thermal treatments

KCI Citation Count: 1

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Bibliographic Details
Published in:The Korean journal of chemical engineering 2006, 23(2), 101, pp.325-328
Main Authors: 한윤봉, Sang Hoon Kim, Ju-Hyung Hong
Format: Article
Language:Korean
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Summary:KCI Citation Count: 1
ISSN:0256-1115
1975-7220