Formation of nanodots and nanostripes of carbon nitride on silicon by plasma and thermal treatments

KCI Citation Count: 1

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Published in:The Korean journal of chemical engineering 2006, 23(2), 101, pp.325-328
Main Authors: 한윤봉, Sang Hoon Kim, Ju-Hyung Hong
Format: Article
Language:Korean
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화학공학
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container_title The Korean journal of chemical engineering
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creator 한윤봉
Sang Hoon Kim
Ju-Hyung Hong
description KCI Citation Count: 1
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subjects 화학공학
title Formation of nanodots and nanostripes of carbon nitride on silicon by plasma and thermal treatments
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