Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification

A low‐noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front‐end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the sour...

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Bibliographic Details
Published in:ETRI journal 2016, 38(2), , pp.235-243
Main Authors: Kim, Yi‐Gyeong, Cho, Min‐Hyung, Lee, Jaewoo, Jeon, Young‐Deuk, Roh, Tae Moon, Lyuh, Chun‐Gi, Yang, Woo Seok, Kwon, Jong‐Kee
Format: Article
Language:English
Subjects:
capacitive microphone
MEMS
Microelectromechanical systems
microphone
positive feedback signal amplification
source follower
voltage booster
전자/정보통신공학
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Summary:A low‐noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front‐end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A‐weighted) of −114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a 136 μA current consumption. The chip is occupied with an active area of 0.35 mm2 and a chip area of 0.54 mm2.
ISSN:1225-6463
2233-7326
DOI:10.4218/etrij.16.2515.0015