A Single-chip Resonance-frequency Tracking Microwave-excited Plasma Driver IC for Portable Biomedical Applications

This paper presents a first-time single-chip microwave-excited plasma driver IC with resonance-frequency tracking and output-power-regulation scheme for biomedical applications. The power module includes a driver IC and a power amplifier, and is designed to provide stable microwave power that is req...

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Bibliographic Details
Published in:Journal of semiconductor technology and science 2020, 20(3), 93, pp.231-241
Main Authors: Ahn, Cheolmin, Kwon, Soon Ku, Park, Beomjin, Koo, Jahyun, Sim, Jae-Yoon
Format: Article
Language:English
Subjects:
전기공학
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Summary:This paper presents a first-time single-chip microwave-excited plasma driver IC with resonance-frequency tracking and output-power-regulation scheme for biomedical applications. The power module includes a driver IC and a power amplifier, and is designed to provide stable microwave power that is required for generation of a plasma jet. A 2.4-GHz coaxial transmission line resonator is used to generate the plasma jet using input microwave power. The proposed system continuously monitors the resonance frequency, and controls it by adaptively changing the microwave frequency. To prevent the plasma jet from becoming high enough to damage human skin, the system monitors the power entering the resonator and keeps it constant. The proposed microwave plasma driver IC is implemented in a 0.18-μm complementary metal-oxide-semiconductor process. The system generates stable 1 W with a frequency tracking. KCI Citation Count: 0
ISSN:1598-1657
2233-4866
DOI:10.5573/JSTS.2020.20.3.231