Precision Control for Beam Irradiation Dose by Developing a Real-time Dose Monitoring System

We have developed a real-time dose monitoring system for a low-energy ion-beam facility. Before we developed the monitoring system, the system had given a substantial error of ±23% when we irradiated an ion beam with a dose as much as 3.0 × 1016 cm−2 on the Si substrate. Moreover, a low irradiation...

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Bibliographic Details
Published in:Journal of the Korean Physical Society 2020, 77(5), , pp.395-398
Main Authors: Hwang, Yong Seok, Kim, Maengjun, Suk, Jaekwon, Lee, Chan Young, Ha, Jun Mok, Kim, Chorong, Kim, Dong Seok, Yeo, Sunmog, Jung, Myung-Hwan, Cho, Won-Je, Jeon, Hye-Ran, Lee, Jae S., Park, Jun Kue
Format: Article
Language:English
Subjects:
Backscattering
Error analysis
Ion beams
Mathematical and Computational Physics
Monitoring
Monitoring systems
Particle and Nuclear Physics
Physics
Physics and Astronomy
Radiation dosage
Real time
Rutherford backscattering spectroscopy
Silicon substrates
Stability
Theoretical
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Summary:We have developed a real-time dose monitoring system for a low-energy ion-beam facility. Before we developed the monitoring system, the system had given a substantial error of ±23% when we irradiated an ion beam with a dose as much as 3.0 × 1016 cm−2 on the Si substrate. Moreover, a low irradiation dose as small as 1013 cm−2 was scarcely able to be controlled because of a too short irradiation time of several seconds, producing a greater dose error. To develop a real-time dose monitoring system, in this work, we employed a current integrator in conjunction with a beam stopper, by which a dose of 3.0 ×1016 cm−2 can be exactly irradiated on the sample with less than ±6% error, which was ensured by the measurements of Rutherford backscattering spectroscopy.
ISSN:0374-4884
1976-8524
DOI:10.3938/jkps.77.395