Three-dimensional Modeling for the Transmittance of ITO/Mesh-Ag/ITO Multilayers using FDTD

In order to improve the transmittance of ITO/Ag/ITO multilayers, Ag layer was formed with mesh structure. For more accurate and practical analysis, we performed the simulations using an optical wave simulator termed the full-wave simulation program. In our simulations, the three dimensional (3D) fin...

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Bibliographic Details
Published in:Journal of semiconductor technology and science 2021, 21(5), 101, pp.348-355
Main Authors: Cho, Eou-Sik, Kwon, Sang Jik
Format: Article
Language:English
Subjects:
전기공학
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Summary:In order to improve the transmittance of ITO/Ag/ITO multilayers, Ag layer was formed with mesh structure. For more accurate and practical analysis, we performed the simulations using an optical wave simulator termed the full-wave simulation program. In our simulations, the three dimensional (3D) finite-difference time-domain (FDTD) method was used to realize the high density mesh structure, and a plane wave with variable wavelengths ranging from 250 to 850 nm is incident in the z-direction at normal incidence to the ITO/Mesh-Ag/ITO film surrounded by free-air space. From the simulation results, at a higher open ratio and lower Ag thickness, the transmittance of ITO/Mesh-Ag/ITO were not influenced by other parameters. Experimental measurements were performed depending on the various Ag mesh-spaces and mesh-widths. The open ratio of about 60 % has shown the acceptable results in the points of both the optical transmittance and the electrical conductance. KCI Citation Count: 0
ISSN:1598-1657
2233-4866
DOI:10.5573/JSTS.2021.21.5.348