Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment

Semiconductor and display production equipment requires highly plasma-resistant components, where α -Al 2 O 3 plays a vital role in shielding and insulating. In the present study, the physicochemical properties of a new domestic α -Al 2 O 3 powder were compared with those of imported ones currently...

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Bibliographic Details
Published in:The Korean journal of chemical engineering 2021, 38(12), 261, pp.2541-2548
Main Authors: Sakthisabarimoorthi, Athiruban, Kang, Min Ji, Yoon, Dang-Hyok
Format: Article
Language:English
Subjects:
Addition polymerization
Aluminum oxide
Biotechnology
Catalysis
Chemistry
Chemistry and Materials Science
Electronic
Heat treatment
Industrial Chemistry/Chemical Engineering
Inorganic
Materials (Organic
Materials Science
Particle size distribution
Shielding
Sintering (powder metallurgy)
Thin Films
Wet processing
화학공학
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Summary:Semiconductor and display production equipment requires highly plasma-resistant components, where α -Al 2 O 3 plays a vital role in shielding and insulating. In the present study, the physicochemical properties of a new domestic α -Al 2 O 3 powder were compared with those of imported ones currently used in the Korean industry. The particle size distribution revealed finer particles in the domestic powder that were generated during dry milling than the imported powder resulting in a broad size distribution and high surface area. An effort was made to eliminate the fine particles by heat treatment because they increase the viscosity of a slurry for wet processing and induce a low green and sintered density of the final products. In addition to the effects of heat treatment on the powder characteristics, the dispersion behavior of an aqueous Al 2 O 3 slip was examined systematically upon the addition of each polymeric processing additive for filter pressing.
ISSN:0256-1115
1975-7220
DOI:10.1007/s11814-021-0915-0