RF sputter를 이용한 실리카 증착 고 내구성 반사 방지막 제조

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Bibliographic Details
Published in:Biuletyn Uniejowski 2019, Vol.52 (2), p.84-89
Main Authors: 전성권(Seong-Gwon Jeon), 정은욱(Eun-Uk Jeong), 나종주(Jong-Joo Rha), 권정대(Jung-Dae Kwon)
Format: Article
Language:Korean
Online Access:Get full text
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ISSN:1225-8024
2299-8403
DOI:10.5695/JKISE.2019.52.2.84