Microfabricated quadrupole ion trap for mass spectrometer applications

An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 microm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejecti...

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Bibliographic Details
Published in:Physical review letters 2006-03, Vol.96 (12), p.120801-120801, Article 120801
Main Authors: Pau, S, Pai, C S, Low, Y L, Moxom, J, Reilly, P T A, Whitten, W B, Ramsey, J M
Format: Article
Language:English
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Summary:An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 microm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10(-4). The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.
ISSN:0031-9007
1079-7114
DOI:10.1103/physrevlett.96.120801